Wang, Yi, Shang, X. and Lancaster, M.J. (2015) Micromachined 3D millimetre-wave and terahertz devices. In: Advanced Materials and Processes for RF and THz Applications (IMWS-AMP). 2015 IEEE MTT-S International Microwave Workshop Series . IEEE. (doi:https://doi.org/10.1109/IMWS-AMP.2015.7324958)

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Abstract

Micromachining is a very promising technology to manufacture miniature three-dimensional (3D) devices at millimeter-wave (mm-wave) and terahertz (THz) frequencies. After a decade’s development, this technology has begun to demonstrate its viability and capability. It has delivered devices with competitive performance to traditional metal machining or electroforming, for coaxial and waveguide structures with sub-millimeter dimensions. This paper will discuss three strands of work that tackle three main challenges - fabrications, designs and measurements – in this technology. Several passive devices will be presented to illustrate the progress made on the multilayered SU8 techniques. These include guided transmission structures and devices based on rectangular coaxial lines, waveguides and free-space frequency selective surfaces. The concerned frequency covers from 30 GHz to 1 THz.

Item Type:	Conference Proceedings
Title of Proceedings:	Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)
Additional Information:	© 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP 2015), Suzhou China, July 1-3 2015.
Uncontrolled Keywords:	Micromachining, Millimeter-wave devices, Waveguides, frequency selective surfaces.
Faculty / School / Research Centre / Research Group:	Faculty of Engineering & Science > School of Engineering (ENG)
Last Modified:	03 Jan 2017 15:36
URI:	http://gala.gre.ac.uk/id/eprint/13504

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