Conference Proceedings

Stoyanov, Stoyan ORCID: 0000-0001-6091-1226 and Marson, Silvia (2011) Model assisted process control in micro- and nano-fabrication using focused ion beam. In: Electronics Technology (ISSE), 2011 34th International Spring Seminar on. Institute of Electrical and Electronics Engineers, Inc., Piscataway, NJ, USA, pp. 424-429. ISBN 978-1-4577-2111-3 ISSN 2161-2528 (doi:https://doi.org/10.1109/ISSE.2011.6053900)