Items where Author is "Hughes, Mike"
Article
Kaufmann, Jens Georg, Desmulliez, Marc P.Y., Tian, Yingtao, Price, Dennis, Hughes, Mike, Strusevitch, Nadia, Bailey, Chris ORCID: https://orcid.org/0000-0002-9438-3879, Liu, Changqing and Hutt, David
(2009)
Megasonic agitation for enhanced electrodeposition of copper.
Microsystem Technologies, 15 (8).
pp. 1245-1254.
ISSN 0946-7076 (Print), 1432-1858 (Online)
(doi:10.1007/s00542-009-0886-2)
Book Section
Kaufmann, Jens, Desmulliez, Marc P.Y., Price, Dennis, Hughes, Mike, Strusevitch, Nadia and Bailey, Chris ORCID: https://orcid.org/0000-0002-9438-3879
(2008)
Influence of megasonic agitation on the electrodeposition of high aspect ratio blind vias.
2nd Electronics System-Integration Technology Conference, 2008. ESTC 2008.
Institute of Electrical and Electronics Engineers, Inc., Piscataway, NJ, USA, pp. 1235-1240.
ISBN 978-1-4244-2813-7
(doi:10.1109/ESTC.2008.4684530)