Wang, Yi, Prest, Martin J. and Lancaster, Michael J. (2008) Membrane Supported Transmission Lines and Filters. In: Microwave Conference, 2008. EuMC 2008. 38th European. IEEE, pp. 1133-1136. ISBN 9782874870064 (doi:https://doi.org/10.1109/EUMC.2008.4751658)

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Abstract

The membrane supported device is attractive because of its capability to realize low loss components at millimeter and sub-millimeter wave frequencies on traditional semiconductor substrates. This is done by eliminating a large portion of the dielectric substrate and suspending the circuit area. This paper presents results of membrane supported transmission lines and Ka-band filters on silicon substrates. The fabrication is enabled by bulk micromachining of the silicon. Two types of filters are designed, one based on a coplanar-waveguide, and the other on microstrip resonators.

Item Type:	Conference Proceedings
Title of Proceedings:	Microwave Conference, 2008. EuMC 2008. 38th European
Additional Information:	[1] This paper was first presented at the 38th European Microwave Conference (EuMC 2008): "Bridging gaps", held from 27-31 October 2008 in Amsterdam, Netherlands. [2] Also has title: Proceedings of the 38th European Microwave Conference, EuMC 2008. [3] ISBN: 9782874870064 (Print); 9782874870057 (CD-ROM); 9782874870057 (E-ISBN).
Uncontrolled Keywords:	micromachining, millimeter wave, filter, transmission line
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
Pre-2014 Departments:	School of Engineering > Mobile & Wireless Communications Research Laboratory
Related URLs:	Publisher
Last Modified:	14 Oct 2016 09:24
URI:	http://gala.gre.ac.uk/id/eprint/9761

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