Wang, Yi, Ke, M. and Lancaster, M.J. (2009) Micromachined 38 GHz cavity resonator and filter with rectangular-coaxial feed-lines. IET Microwaves, Antennas & Propagation, 3 (1). pp. 125-129. ISSN 1751-8725 (Print), 1751-8733 (Online) (doi:https://doi.org/10.1049/iet-map:20080011)

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Abstract

Micromachined, multilayer cavity resonators and filters at 38 GHz are demonstrated. Each layer is made of gold-coated silicon, structured by deep reactive etching. Two external coupling structures by coaxial feed lines are proposed to suit the fabrication process. The measured resonator gives an unloaded Q-value of 343 at 38 GHz. Methods to further improve the resonator quality-factors are discussed. The measured insertion loss of the filter is 1.01 dB, the 3 dB bandwidth is from 36.53 to 39.13 GHz, and the return loss is better than −15 dB over the frequency range from 37.0 to 38.6 GHz.

Item Type:	Article
Additional Information:	[1]Journal has other title: Microwaves, Antennas & Propagation, IET. [2] Date of current version: 27 January 2009.
Uncontrolled Keywords:	micromachining, cavity resonator, filter, millimetre wave
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
Pre-2014 Departments:	School of Engineering > Mobile & Wireless Communications Research Laboratory
Related URLs:	Publisher Publisher
Last Modified:	14 Oct 2016 09:24
URI:	http://gala.gre.ac.uk/id/eprint/9730

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