Prest, M.J., Wang, Y., Huang, F. and Lancaster, M.J. (2008) Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits. Journal of Micromechanics and Microengineering, 18 (12):125003. ISSN 0960-1317 (Print), 1361-6439 (Online) (doi:https://doi.org/10.1088/0960-1317/18/12/125003)

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Abstract

Tuning of a superconducting microwave resonator, operating at 77 K, is demonstrated using a silicon micro-machined comb-drive actuator. Thermal expansion coefficient differences between the silicon actuator and the MgO substrate are accommodated by the use of stress absorbing springs. A tuning range of 4.6% is demonstrated for a superconducting microwave resonator with a frequency just below 6 GHz.

Item Type:	Article
Additional Information:	[1] Published 23 October 2008.
Uncontrolled Keywords:	mcro- and nano-electromechanical systems (MEMS/NEMS) and devices, superconducting devices, microelectronic circuits, microwave circuits
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
Pre-2014 Departments:	School of Engineering School of Engineering > Department of Computer & Communications Engineering School of Engineering > Mobile & Wireless Communications Research Laboratory
Related URLs:	Publisher Organisation
Last Modified:	14 Oct 2016 09:21
URI:	http://gala.gre.ac.uk/id/eprint/8456

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