Tang, Ying Kit (2012) A risk analysis methodology for micro/nano manufacturing. PhD thesis, University of Greenwich.

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Abstract

This research concerns the development of a risk analysis and mitigation methodology for assessing the impact of uncertainties and complexity of the design requirements arising in new process and product developments in micro and nano manufacturing. The risk analysis methodology integrates different computational approaches for process and product analysis, including the reduced order modelling using design of experiments, risk analysis using sampling-based and analytical methods and optimisation techniques. The integrated risk analysis and optimisation methodology is applied to two applications: (1) the FIB sputtering process control, and (2) a flip chip design. Three different FIB processes using different ion sources were investigated in order to evaluate their process performance with respects to different process parameter uncertainties. A critical comparison of the process capability against the specification limits of different processes was studied.

As parts of the research, a new modified computational model is developed for a material sputtering process using focused ion beam (FIB). This model allows the analysis of micro- and nano-structures shape with the FIB machine controlled through multiple beam scans and different beam overlapping. The FIB model related studies also address the modelling requirements for including material re-deposition effects that occur during FIB milling. The model has been validated using an experimental test case. Good agreement is observed between the analytical shape using the model and the actual experiment. The validated model enhances the accuracy of the dwell time prediction. This approach overcomes the dependence of a trial-and-error approach of the process control in nano-manufacturing industry.

The proposed methodology is also used to address a design problem of a flip chip design. A novel method for the evaluation of the environmental impact of the flip chip design in a multi-disciplinary optimisation problem is proposed. The goal is to address materials constraints due to environmental regulations and to handle different types of requirements such as the reliability and cost. An optimal flip chip design reliability function is identified. The approach allows electronics manufacturers to consider the environmental impact amongst different design alternatives at an early stage of the design of the product before any real prototyping in order to reduce the total manufacturing life cycle.

Item Type:	Thesis (PhD)
Additional Information:	uk.bl.ethos.549135
Uncontrolled Keywords:	product design, micro manufacturing, nano manufacturing, computer modelling, prototypes,
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TS Manufactures
Pre-2014 Departments:	School of Computing & Mathematical Sciences School of Computing & Mathematical Sciences > Department of Mathematical Sciences
Last Modified:	14 Oct 2016 09:20
URI:	http://gala.gre.ac.uk/id/eprint/8054

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