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Micromachined Rectangular Coaxial Line and Cavity Resonator for 77 GHz Applications using SU8 Photoresist

Micromachined Rectangular Coaxial Line and Cavity Resonator for 77 GHz Applications using SU8 Photoresist

Ke, Maolong, Wang, Yi, Jiang, Kyle and Lancaster, Michael J. (2008) Micromachined Rectangular Coaxial Line and Cavity Resonator for 77 GHz Applications using SU8 Photoresist. In: Microwave Conference, 2008. APMC 2008. Asia-Pacific. IEEE, pp. 1-4. ISBN 9781424426416 (doi:10.1109/APMC.2008.4957973)

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Abstract

Thick SU8 photoresist technique is used to fabricate two millimetre-wave components. Firstly, an air-filled rectangular coaxial line operating from 55 to 87 GHz is fabricated and tested, and an insertion loss of 0.8dB and return loss of better than –15dB was obtained. The overall measured responses agree well with full-wave simulation results. Secondly, a cavity resonator operating at 77GHz is reported. An unloaded Q value of 569 was obtained, which
is, to our knowledge, one of the best reported so far in a similar structure.

Item Type: Conference Proceedings
Title of Proceedings: Microwave Conference, 2008. APMC 2008. Asia-Pacific
Additional Information: [1] This paper was first presented at the 2008 Asia Pacific Microwave Conference (APMC 2008), held from 16-20 December 2008 in Hong Kong and Macau, China. [2] Conference proceedings also has title: Proceedings of 2008 Asia Pacific Microwave Conference. [3] ISBN: 9781424426416 (print); 9781424426423 (E-ISBN).
Uncontrolled Keywords: micromachining, SU-8, resonator, filter, millimetre wave
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Pre-2014 Departments: School of Engineering > Mobile & Wireless Communications Research Laboratory
Related URLs:
Last Modified: 14 Oct 2016 09:24
Selected for GREAT 2016: None
Selected for GREAT 2017: None
Selected for GREAT 2018: None
URI: http://gala.gre.ac.uk/id/eprint/9742

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