Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits
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Prest, M.J., Wang, Y., Huang, F. and Lancaster, M.J. (2008) Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits. Journal of Micromechanics and Microengineering, 18 (12). p. 125003. ISSN 0960-1317 (Print), 1361-6439 (Online) (doi:10.1088/0960-1317/18/12/125003)
Full text not available from this repository.Official URL: http://dx.doi.org/10.1088/0960-1317/18/12/125003
Abstract
Tuning of a superconducting microwave resonator, operating at 77 K, is demonstrated using a silicon micro-machined comb-drive actuator. Thermal expansion coefficient differences between the silicon actuator and the MgO substrate are accommodated by the use of stress absorbing springs. A tuning range of 4.6% is demonstrated for a superconducting microwave resonator with a frequency just below 6 GHz.
| Item Type: | Article |
|---|---|
| Additional Information: | [1] Published 23 October 2008. |
| Uncontrolled Keywords: | mcro- and nano-electromechanical systems (MEMS/NEMS) and devices, superconducting devices, microelectronic circuits, microwave circuits |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| School / Department / Research Groups: | School of Engineering School of Engineering > Department of Computer & Communications Engineering School of Engineering > Mobile & Wireless Communications Engineering Research Laboratory |
| Related URLs: | |
| Last Modified: | 13 May 2013 17:31 |
| URI: | http://gala.gre.ac.uk/id/eprint/8456 |
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