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Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits

Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits

Prest, M.J., Wang, Y., Huang, F. and Lancaster, M.J. (2008) Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits. Journal of Micromechanics and Microengineering, 18 (12):125003. ISSN 0960-1317 (Print), 1361-6439 (Online) (doi:10.1088/0960-1317/18/12/125003)

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Abstract

Tuning of a superconducting microwave resonator, operating at 77 K, is demonstrated using a silicon micro-machined comb-drive actuator. Thermal expansion coefficient differences between the silicon actuator and the MgO substrate are accommodated by the use of stress absorbing springs. A tuning range of 4.6% is demonstrated for a superconducting microwave resonator with a frequency just below 6 GHz.

Item Type: Article
Additional Information: [1] Published 23 October 2008.
Uncontrolled Keywords: mcro- and nano-electromechanical systems (MEMS/NEMS) and devices, superconducting devices, microelectronic circuits, microwave circuits
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Pre-2014 Departments: School of Engineering
School of Engineering > Department of Computer & Communications Engineering
School of Engineering > Mobile & Wireless Communications Research Laboratory
Related URLs:
Last Modified: 14 Oct 2016 09:21
Selected for GREAT 2016: None
Selected for GREAT 2017: None
Selected for GREAT 2018: None
URI: http://gala.gre.ac.uk/id/eprint/8456

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