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Characterisation of ion transportation during electroplating of high aspect ratio microvias using megasonic agitation

Characterisation of ion transportation during electroplating of high aspect ratio microvias using megasonic agitation

Costello, S., Strusevich, N., Patel, M.K., Bailey, C., Flynn, D., Kay, R.W., Price, D., Bennett, M., Jones, A.C., Habeshaw, R., Demore, C., Cochran, S. and Desmulliez, M.P.Y. (2011) Characterisation of ion transportation during electroplating of high aspect ratio microvias using megasonic agitation. In: EMPC-2011: 18th European Microelectronics and Packaging Conference. Proceedings. IEEE Conference Publications . Institute of Electrical and Electronic Engineers, Inc., Piscataway, NJ, USA, pp. 1-7. ISBN 9780956808606

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Abstract

This paper presents the characterisation of the flow streams of an electrolyte solution during the electroplating of high aspect ratio microvias using megasonic agitation. The electrolyte fluid flow without acoustic streaming is firstly examined using micro-particle imaging velocimetry (micro-PIV) to establish the velocity of the flow at the mouth and within the microvias. Secondly, the average acoustic pressure developed by the transducer used for the megasonic agitation of the solution is measured using a fibre optic hydrophone. The fibre optic hydrophone is also used to determine the pressure in the mouth of microvia in a test Printed Circuit Board (PCB). The experimental results are then used to validate the flow and acoustic models created to optimise the set of experimental parameters which ensure the successful electroplating of high aspect ratio microvias in a PCB. The lack of fluid flow and, hence, transport of ions is demonstrated in blind microvias. It is also proved that acoustic pressure directed into the via promotes ion transport.

Item Type: Conference Proceedings
Title of Proceedings: EMPC-2011: 18th European Microelectronics and Packaging Conference. Proceedings
Additional Information: [1] This paper was first presented at the 18th European Conference on Microelectronics and Packaging (EMPC-2011), held from 12-15 September 2011 in Brighton, UK. [2] INSPEC Accession Number: 12526380
Uncontrolled Keywords: electrolyte fluid flow, micro-particle imaging velocimetry (micro-PIV), fibre optic hydrophone, printed circuit board (PCB), high aspect ratio microvias
Subjects: Q Science > Q Science (General)
Q Science > QA Mathematics
Q Science > QA Mathematics > QA75 Electronic computers. Computer science
Pre-2014 Departments: School of Computing & Mathematical Sciences
School of Computing & Mathematical Sciences > Department of Mathematical Sciences
Related URLs:
Last Modified: 14 Oct 2016 09:19
Selected for GREAT 2016: None
Selected for GREAT 2017: None
Selected for GREAT 2018: None
URI: http://gala.gre.ac.uk/id/eprint/7884

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