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Computational modelling and optimisation of the fabrication of nano-structures using focused ion beam and imprint forming technologies

Computational modelling and optimisation of the fabrication of nano-structures using focused ion beam and imprint forming technologies

Stoyanov, S. ORCID: 0000-0001-6091-1226, Bailey, C., Tang, Y.K., Marson, S., Dyer, A., Allen, D. and Desmulliez, M. (2010) Computational modelling and optimisation of the fabrication of nano-structures using focused ion beam and imprint forming technologies. Journal of Physics: Conference Series (JPCS), 253 (1):012008. ISSN 1742-6588 (Print), 1742-6596 (Online) (doi:10.1088/1742-6596/252/1/012008)

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Abstract

Focused Ion Beam (FIB) and Nano-Imprint Forming (NIF) have gained recently major interest because of their potential to enable the fabrication of precision engineering parts
and to deliver high resolution, low-cost and high-throughput production of fine sub-micrometre structures respectively. Using computational modelling and simulation becomes increasingly important in assessing capabilities and risks of defects with respect to product
manufacturability, quality, reliability and performance, as well as controlling and optimising the process parameters. A computational model that predicts the milling depth as function of the ion beam dwell times and a number of process parameters in the case of FIB milling is
investigated and experimentally validated. The focus in the NIF study is on modelling the material deformation and the filling of the pattern grooves during the mould pressing using non-linear large deformation finite element analysis with hyperelastic non-compressive material behaviour. Simulation results are used to understand the risk of imperfections in the pattern replication and to identify the optimal process parameters and their interaction.

Item Type: Article
Additional Information: [1] This paper forms part of the published proceedings from 16 ISCMP: Progress in Solid State and Molecular Electronics, Ionics and Photonics, held 29 August - 3 September 2010, Varna, Bulgaria.
Uncontrolled Keywords: computational modelling, material deformation
Subjects: Q Science > QA Mathematics > QA75 Electronic computers. Computer science
Q Science > QC Physics
Pre-2014 Departments: School of Computing & Mathematical Sciences
School of Computing & Mathematical Sciences > Department of Computer Systems Technology
School of Computing & Mathematical Sciences > Department of Mathematical Sciences
Related URLs:
Last Modified: 14 Oct 2016 09:11
Selected for GREAT 2016: None
Selected for GREAT 2017: None
Selected for GREAT 2018: None
URI: http://gala.gre.ac.uk/id/eprint/4491

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