Numerical modelling methodology for design of miniaturised integrated products - an application to 3D CMM micro-probe development

Rajaguru, P.R., Stoyanov, Stoyan, Tang, Ying Kit, Bailey, Christopher, Claverley, James, Leach, Richard and Topham, David (2010) Numerical modelling methodology for design of miniaturised integrated products - an application to 3D CMM micro-probe development. In: 2010 11th International Conference on Thermal, Mechanical and Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems, EuroSimE 2010. IEEE Computer Society, Piscataway NJ. ISBN 9781424470266

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Abstract

This paper presents an integrated numerically-driven
modelling methodology for the design of miniaturised/
integrated (Mintegrated) products and the selection/
control of associated manufacturing processes. The focus
is on the numerical techniques and methods that underpin
several design procedures aiding the embodiment design
stage of product development. A design assistant tool is
developed as an end-user navigation interface that
captures recommended design activities for the
development of novel micro-integrated products and the
supporting tools for their realisation. The main focus is
placed on those design procedures comprising numerical
methods for the simulation and modelling of the
performance and behaviour of a product or process, and
the analysis of their design in terms of risk of failure,
capability of satisfying specification limits and optimality.
The methodology enables an efficient and fast design
process and can be applied to a wide range of microproduct
developments. The applications range from the
fabrication of micro- and nano-scale structures and
components for heterogeneous systems, to micro-fluidics,
metrology and embedded test devices. In this study, a
number of design procedures and associated numerical
techniques are demonstrated for the design of a new
three-dimensional coordinate measuring machine (CMM)
micro-probe developed at the National Physical
Laboratory (NPL, UK).

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