On the integration of microwave curing systems into microelectronics assembly processes

Adamietz, R., Müller, G., Othman, N., Eicher, F., Tilford, T., Ferenets, M., Pavuluri, S.K., Desmulliez, M. P.Y. and Bailey, C. (2010) On the integration of microwave curing systems into microelectronics assembly processes. In: Electronics System Integration Technology Conference, ESTC 2010 - Proceedings. IEEE Computer Society, Piscataway, USA, pp. 1-6. ISBN 9781424485536 (Print), 9781424485543 (Online)

Abstract

In microelectronics packaging applications a variety of thermosetting polymer materials is applied. Such materials are dispensed in a liquid form and are heated with the intent to cure them. Conventional processes often take several hours to bring the material up to temperatures which result in a significant rate of cure. An alternative approach to curing thermosetting polymers is the use of microwave energy, which has been shown to cure encapsulant materials in substantially shorter times. A recent innovation is the open-ended microwave oven proposed by Sinclair et al.. This paper deals with the implementation of the open-ended microwave oven into a precision placement machine. Two test products for encapsulation and flip-chip serve as objective for microwave-assisted assembly. An integrated system setup including the open ended oven is presented. Modifications on the open-ended microwave oven are described and a concept for the development of an embedded microwave curing system is presented. Tests on curing encapsulant materials dispensed over a commercially available QFN were performed to determine post-process functionality of the package, with no evident detrimental effects.

Actions (login required)