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Prest, M.J., Wang, Yi, Huang, F. and Lancaster, M.J. (2010) Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator. Journal of Micromechanics and Microengineering, 20 (9):095032. ISSN 0960-1317 (Print), 1361-6439 (Online) (doi:https://doi.org/10.1088/0960-1317/20/9/095032)