millimeter-wave and terahertz components

Tian, Y., Shang, X., Wang, Yi and Lancaster, M. (2015) Investigation of SU8 as A Structural Material for Fabricating Passive Millimetre-wave and Terahertz Components. Journal of Micro/Nanolithography, MEMS, and MOEMS, 14 (4):044507. ISSN 1932-5150 (Print), 1932-5134 (Online) (doi:https://doi.org/10.1117/1.JMM.14.4.044507)

SU8 photolithography

Tian, Y., Shang, X., Wang, Yi and Lancaster, M. (2015) Investigation of SU8 as A Structural Material for Fabricating Passive Millimetre-wave and Terahertz Components. Journal of Micro/Nanolithography, MEMS, and MOEMS, 14 (4):044507. ISSN 1932-5150 (Print), 1932-5134 (Online) (doi:https://doi.org/10.1117/1.JMM.14.4.044507)