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Membrane Supported Transmission Lines and Filters

Membrane Supported Transmission Lines and Filters

Wang, Yi, Prest, Martin J. and Lancaster, Michael J. (2008) Membrane Supported Transmission Lines and Filters. In: Microwave Conference, 2008. EuMC 2008. 38th European. IEEE, pp. 1133-1136. ISBN 9782874870064 (doi:

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The membrane supported device is attractive because of its capability to realize low loss components at millimeter and sub-millimeter wave frequencies on traditional semiconductor substrates. This is done by eliminating a large portion of the dielectric substrate and suspending the circuit area. This paper presents results of membrane supported transmission lines and Ka-band filters on silicon substrates. The fabrication is enabled by bulk micromachining of the silicon. Two types of filters are designed, one based on a coplanar-waveguide, and the other on microstrip resonators.

Item Type: Conference Proceedings
Title of Proceedings: Microwave Conference, 2008. EuMC 2008. 38th European
Additional Information: [1] This paper was first presented at the 38th European Microwave Conference (EuMC 2008): "Bridging gaps", held from 27-31 October 2008 in Amsterdam, Netherlands. [2] Also has title: Proceedings of the 38th European Microwave Conference, EuMC 2008. [3] ISBN: 9782874870064 (Print); 9782874870057 (CD-ROM); 9782874870057 (E-ISBN).
Uncontrolled Keywords: micromachining, millimeter wave, filter, transmission line
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Pre-2014 Departments: School of Engineering > Mobile & Wireless Communications Research Laboratory
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Last Modified: 14 Oct 2016 09:24

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