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Cryogenic performance of micromachined silicon rocking actuator for tuning a superconducting resonator

Cryogenic performance of micromachined silicon rocking actuator for tuning a superconducting resonator

Wang, Yi, Prest, M.J. and Lancaster, M.J. (2010) Cryogenic performance of micromachined silicon rocking actuator for tuning a superconducting resonator. Electronics Letters, 46 (23). pp. 1569-1571. ISSN 0013-5194 (Print), 1350-911X (Online) (doi:https://doi.org/10.1049/el.2010.8454)

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Abstract

A micromachined silicon rocking actuator is used to tune a high temperature superconducting resonator. Its performance at cryogenic temperatures from 77 to 30K is studied. A significant increase in the quality factor of the resonator, from 376 to 13876, is observed. It is confirmed that the change in resistance of the silicon tuning probe with temperature is the main factor responsible for the improvement. At low temperature, the silicon becomes an excellent dielectric, which makes it a good material for low-loss tuners.

Item Type: Article
Uncontrolled Keywords: MEMS, superconducting resonator, tunable circuit, cryogenic measurement
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Pre-2014 Departments: School of Engineering > Mobile & Wireless Communications Research Laboratory
Related URLs:
Last Modified: 14 Oct 2016 09:24
Selected for GREAT 2016: None
Selected for GREAT 2017: None
Selected for GREAT 2018: None
Selected for GREAT 2019: None
URI: http://gala.gre.ac.uk/id/eprint/9757

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