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Measurements of Micromachined Submillimeter Waveguide Circuits

Measurements of Micromachined Submillimeter Waveguide Circuits

Shang, Xiaobang, Lancaster, Michael J., Ke, Maolong and Wang, Yi (2010) Measurements of Micromachined Submillimeter Waveguide Circuits. In: Microwave Measurement Symposium (ARFTG), 2010 76th ARFTG. IEEE, pp. 1-4. ISBN 9781424474479 (doi:

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In this paper two calibrated measurement methods for submillimeter circuits are presented and micromachined waveguides operating between 220 and 325 GHz have been fabricated using thick SU-8 photoresist technology and tested. The first measurement method is achieved by employing a pair of micromachined embedded H-plane bends, which were specially designed to enable direct and accurate connection between the micromachined circuit and standard waveguide flanges. A 16 mm long WR-3 waveguide has been designed, fabricated and measured using this technology. The measured average insertion loss is 2.3 dB or 0.144 dB/mm over the frequency range of 220 - 321 GHz. The second measurement technology employs a conventionally machined metal block constructed with two separate pieces in which to mount the micromachined circuit. A choke flange has been adopted for eliminating the effect of air gap at the interfaces between the micromachined circuit and metal block. A 15 mm long WR-3 straight waveguide has been fabricated and tested. The measured insertion loss is between 1.4 dB and 3.2 dB corresponding to 0.093 and 0.213 dB/mm. A comparison between these two measurement technologies has been carried out and presented.

Item Type: Conference Proceedings
Title of Proceedings: Microwave Measurement Symposium (ARFTG), 2010 76th ARFTG
Additional Information: [1] This paper was first presented at the 76th ARFTG Microwave Measurement Symposium: Millimeter-Wave Measurements and Modeling (ARFTG 2010), held from 30 November - 3 December 2010 in Florida, USA. [2] Conference proceedings has other title: 76th ARFTG Microwave Measurement Conference: Millimeter-wave Measurements and Modeling. [3] 9781424474479 (Print ISBN); 9781424474486 (Book ISBN).
Uncontrolled Keywords: micromachining; submillimeter wave devices; WR-3 waveguide; microwave measurement
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Pre-2014 Departments: School of Engineering > Mobile & Wireless Communications Research Laboratory
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Last Modified: 14 Oct 2016 09:24

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