Skip navigation

Micromachined W-band waveguide and filter with two embedded H-plane bends

Micromachined W-band waveguide and filter with two embedded H-plane bends

Shang, X., Ke, M., Wang, Yi and Lancaster, M.J. (2011) Micromachined W-band waveguide and filter with two embedded H-plane bends. IET Microwaves, Antennas & Propagation, 5 (3). pp. 334-339. ISSN 1751-8725 (Print), 1751-8733 (Online) (doi:

Full text not available from this repository.


A micromachined W-band through waveguide together with a passband filter embedded with a pair of H-plane bends is presented here. The novel design of the bend enabled direct and accurate connection between the micromachined circuit and standard waveguide flanges. The devices were fabricated using thick SU-8 photoresist technology. They were constructed with six gold- or silver-coated SU-8 layers, each of a thickness of 0.635 mm. These layers were then bonded on top of each other to form the waveguide and filter. A measured average insertion loss of 0.5 dB or 0.0278 dB/mm has been achieved by the 18 mm long through waveguide, and the return loss is better than 18.8 dB in the whole W-band. The asymmetrical capacitive irises coupled filter shows a -3 dB bandwidth of 8.61 GHz at a central frequency of 88.47 GHz. The passband insertion loss was measured to be between 0.97 and 1.1 dB and reflection loss is better than 15 dB. This performance demonstrates the potential of employing this micromachining and multi-layered technique to fabricate millimetre and submillimetre waveguide components.

Item Type: Article
Additional Information: [1] Date of current version: 17 February 2011. [2] Journal has other title: Microwaves, Antennas & Propagation, IET.
Uncontrolled Keywords: micromachining, W-band, waveguide filter, waveguide bend, millimetre wave
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Pre-2014 Departments: School of Engineering > Mobile & Wireless Communications Research Laboratory
Related URLs:
Last Modified: 14 Oct 2016 09:24

Actions (login required)

View Item View Item