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Transfer of functional ceramic thin films using a thermal release process

Transfer of functional ceramic thin films using a thermal release process

Dou, Guangbin, Holmes, Andrew S., Yeatman, Eric M., Wright, Robert V., Kirby, Paul B. and Yin, Chunyan ORCID: 0000-0003-0298-0420 (2011) Transfer of functional ceramic thin films using a thermal release process. Advanced Materials, 23 (10). pp. 1252-1256. ISSN 0935-9648 (Print), 1521-4095 (Online) (doi:https://doi.org/10.1002/adma.201004391)

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Abstract

Being ferroelectric, piezoelectric, and pyroelectric, lead zirconate titanate (PZT) is one of the most useful and prominent electroceramics and is commonly used as the transduction element of actuators and sensors in microelectromechanical systems (MEMS) and micro-optics [1–6] and in memory devices. [7,8] It is also being explored for new applications such as nanorods, [9] domain physics, [10] and nanodevices. [11,12] Transfer of PZT thin films can allow integration of such films on substrates that are incompatible with the requirements of film deposition. However, transfer of functional ceramic thin films has long been hampered by the difficulty of detaching the film from the growth substrate. [13,14] Here, we describe a transfer process for PZT films grown on Ti/Pt coated Si wafers, where the films are solder bonded onto a target substrate and lifted off in one step, using separation of the PZT–Pt interface by thermal stress. The transferred films show low mechanical damage, ferroelectric hysteresis with an “imprinted” polarization, [15] reduced permittivity, and improved loss tangent.

Item Type: Article
Uncontrolled Keywords: ferroelectric, piezoelectric, pyroelectric, lead zirconate titanate (PZT), electroceramics, microelectromechanical systems (MEMS), micro-optics, memory devices, nanorods, nanodevices, PZT thin films, Ti/Pt coated Si wafers
Subjects: Q Science > QA Mathematics > QA75 Electronic computers. Computer science
Pre-2014 Departments: School of Computing & Mathematical Sciences
School of Computing & Mathematical Sciences > Centre for Numerical Modelling & Process Analysis
School of Computing & Mathematical Sciences > Department of Mathematical Sciences
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Last Modified: 20 Mar 2019 10:36
Selected for GREAT 2016: None
Selected for GREAT 2017: None
Selected for GREAT 2018: None
Selected for GREAT 2019: None
URI: http://gala.gre.ac.uk/id/eprint/7562

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