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Micromachined thick mesh filters for millimeter-wave and terahertz applications

Micromachined thick mesh filters for millimeter-wave and terahertz applications

Wang, Yi, Yang, Bin, Tian, Yingtao, Donnan, Robert S. and Lancaster, Michael J. (2014) Micromachined thick mesh filters for millimeter-wave and terahertz applications. IEEE Transactions on Terahertz Science and Technology, 4 (2). pp. 247-253. ISSN 2156-342X (doi:

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This paper presents several freestanding bandpass mesh filters fabricated using an SU-8-based micromachining technique. The important geometric feature of the filters, which SU8 is able to increase, is the thickness of the cross-shaped micromachined slots. This is five times its width. This thickness offers an extra degree of control over the resonance characteristics. The large thickness not only strengthens the structures, but also enhances the resonance quality factor ( Q-factor). A 0.3-mm-thick, single-layer, mesh filter resonant at 300 GHz has been designed and fabricated and its performance verified. The measured Q-factor is 16.3 and the insertion loss is 0.98 dB. Two multi-layer filter structures have also been demonstrated. The first one is a stacked structure of two single mesh filters producing a double thickness, which achieved a further increased Q-factor of 27. This is over six times higher than a thin mesh filter. The second multilayer filter is an electromagnetically coupled structure forming a two-pole filter. The coupling characteristics are discussed based on experimental and simulation results. These thick mesh filters can potentially be used for sensing and material characterization at millimeter-wave and terahertz frequencies.

Item Type: Article
Additional Information: [1] This is an Open access article, available under the Creative Commons Attribution License (CC BY). [2] Citation: Yi Wang; Bin Yang; Yingtao Tian; Donnan, R.S.; Lancaster, M.J., "Micromachined Thick Mesh Filters for Millimeter-Wave and Terahertz Applications," Terahertz Science and Technology, IEEE Transactions on , vol.4, no.2, pp.247,253, March 2014 doi: 10.1109/TTHZ.2013.2296564 [3] Funding: This work was supported by the University of Greenwich Research and Enterprise Investment Programme 2012/13 and the U.K. Engineering and Physical Sciences Research Council under Contract EP/I014845/1 and Contract EP/H029656/1.
Uncontrolled Keywords: bandwidth, couplings, educational institutions, materials, millimeter wave technology, resonant frequency, sensitivity, filters, frequency-selective surfaces (FSSs), micromachining, millimeter-wave (mm-wave) devices
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Faculty / School / Research Centre / Research Group: Faculty of Engineering & Science
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Last Modified: 21 Apr 2017 10:49

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